کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
736872 | 1461577 | 2008 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Design and input-shaping control of a novel scanner for high-speed atomic force microscopy
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
A novel design of a scanning unit for atomic force microscopy (AFM) is presented that enables scanning speeds three orders of magnitude faster than compared to conventional AFMs. The new scanner is designed for high mechanical resonance frequencies, based on a new scanner design, which is optimized using finite element analysis. For high-speed scanning a new controller, based on input-shaping techniques, has been developed that reduces imaging artifacts due to the scanner’s dynamics. The implementation of the new AFM system offers imaging capabilities of several thousand lines per second with a scanning range of 13 μm in both scanning directions, and the freedom to choose the fast scan-axis in any arbitrary direction in the X–Y-plane.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechatronics - Volume 18, Issues 5–6, June 2008, Pages 282–288
Journal: Mechatronics - Volume 18, Issues 5–6, June 2008, Pages 282–288
نویسندگان
Georg Schitter, Philipp J. Thurner, Paul K. Hansma,