Getter free vacuum packaging for MEMS

Quite a few MEMS devices such as accelerators, gyroscopes, infrared sensors need to work in vacuum environment to enhance their performance. The traditional vacuum packaging methods use getters to increase vacuum maintaining lifetime. However, the getter's characteristics of high temperature activation, powder pollution, large package size limit its use in MEMS vacuum packaging. This study analyzes the factors that influence the vacuum level, and derived a relationship between the balanced vacuum level, the effective leak rate, and vacuum maintaining lifetime. A novel vacuum package design with vacuum buffer cavity was proposed, the vacuum maintaining lifetime could be increased at least 20 times as compared to the ordinary package with the same volume. Reliability experiments were conducted so as to verify that the new package design can achieve reliable vacuum packaging without getters to meet the requirements of device applications for vacuum with about 0.1 Pa in pressure level. This unique package design also provided a complementary way to work with getters to enhance the vacuum package performance and reliability of hermeticity.