کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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737120 | 1461905 | 2013 | 6 صفحه PDF | دانلود رایگان |
In this paper, a facile polymer fabrication approach by combination of hot embossing and polymer shrinking is presented to reduce the feature size and dramatically increase the aspect ratio of imprinted microstructures. Pre-pattern is hot embossed on a heat shrinkable polymer at low temperature to reserve a good shrinkage and recovery. The projected structures are removed by a polishing process. Finally, new microstructures derive from the pre-pattern at the absence of removed materials after baking process. Through this way, both two- and three-dimensional hot embossed structures were successfully shrunk into a smaller scale. The width along two lateral directions reduced to two-fifths, and the height along vertical direction increased by 6 times. Detailed features at different layers exhibit clearly three-dimensional shrunk microstructures. This polymer-shrinking process brings a new way to extend the fabrication capability of hot embossing process.
Journal: Sensors and Actuators A: Physical - Volume 195, 1 June 2013, Pages 21–26