High-uniformity post-CMOS uncooled microbolometer focal plane array integrated with active matrix circuit

This paper presents a high-uniformity post-CMOS fabricated uncooled microbolometer focal plane array (MFPA) integrated with an active matrix circuit. The MFPA is consisted of 64 by 64 microbolometer cells. To improve the output non-uniformity, the active matrix circuit with column-wise transistor-sharing scheme is proposed. The active matrix circuit selects the row and column of MFPA, calibrates the output offset and the output gain, and converts the resistance changes of MFPA to the output currents. The output non-uniformity with the proposed scheme is reduced to 26 %, compared to the conventional scheme.