A biocompatible Parylene thermal flow sensing array

A microelectromechanical systems (MEMS) thermal flow sensing array constructed of biocompatible materials has been designed, fabricated, and tested. In addition to the construction, the electronic biasing conditions were selected such that sensor operation was compatible with biological fluids. The device comprises several thin film platinum sensing elements sandwiched in a Parylene C membrane. The membrane is suspended over a bulk-micromachined silicon channel for improved thermal isolation. This sensing array layout permits, for the first time, operation in multiple flow sensing modes using a single device. Multi-mode testing was performed in hot-film, calorimetric, and time-of-flight modes at low overheat ratios. Furthermore, constant current (CC) and constant temperature (CT) biasing methods were explored in hot-film mode. The results of the various testing modes were compared and flow sensing down to 0.5 μL/min has been demonstrated.