کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
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737242 | 893920 | 2008 | 9 صفحه PDF | دانلود رایگان |
We present the design, fabrication and experimental characterization of a new micromachined electromagnetic probe, which can be readily adapted to various biological manipulation and stimulation applications. The micro electromagnetic probe consists of a protruding (out-of-chip), sharp Permalloy needle embedded into a three-dimensional gold conducting coil. The probe fabrication is carried out using traditional surface micromachining processes coupled with assembly techniques. This hybrid approach significantly reduces fabrication difficulties and provides a simple and straightforward technique to realize integrated core-coil geometries. Furthermore, by using a scanning Hall probe microscope (SHPM), a comprehensive, high-spatial resolution characterization of the probe performance (e.g. peak magnetic intensity and spatial field distribution) is achieved for the first time. The manipulation of sub-micron sized magnetic particles with the developed micro electromagnetic probe is also demonstrated.
Journal: Sensors and Actuators A: Physical - Volume 144, Issue 1, 28 May 2008, Pages 213–221