Micro-impedance inclinometer with wide-angle measuring capability and no damping effect

This paper reports a high-performance impedance-type inclinometer fabricated in a glass–SU-8–glass sandwich structure for wide-angle measurements with rapid sensing response. The output signal of the proposed-inclinometer is read from a moving-metal pendulum based on the electrical potential measurement scheme. Two types of pendulum mass made by Ga–In–Sn alloy and mercury are used for the inclinometer. The friction between the liquid metal and substrate surfaces is dramatically reduced by applying an organic-based surfactant of SDS. Experimental results show the developed inclinometer has a wide linear range (320°) and a high angle resolution (0.3°). Performance test shows no time lag for the sensor output under a rotation speed of 1/8 rps, and no damping effect for an instant stop from a rotation speed of 45°/s. The developed inclinometer provides a simple yet high-performance solution for tile angle measurement.