کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
737314 | 1461911 | 2013 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Temperature and humidity effects on the quality factor of a silicon lateral rotary micro-resonator in atmospheric air
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The temperature and humidity dependence of the quality factor of MEMS lateral rotary resonators operating in atmospheric air was analyzed and measured. The quality factor of a monocrystalline silicon lateral rotary micro-resonator was analytically modeled and numerically evaluated based on air shear damping loss mechanisms. The effect of temperature and humidity on each air damping mechanism was attributed to the thermophysical properties of humid air. The damping model predicted qualitatively the experimental results for a large range of temperature (from 20 °C to 80 °C) and humidity (from 30% to 90% RH). These environmental effects can be taken into account for the design of MEMS devices operating in air, such as chemical microsensors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 189, 15 January 2013, Pages 380–389
Journal: Sensors and Actuators A: Physical - Volume 189, 15 January 2013, Pages 380–389
نویسندگان
E. Hosseinian, P.-O. Theillet, O.N. Pierron,