کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
737332 | 1461911 | 2013 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A novel checker-patterned AlN MEMS resonator as gravimetric sensor
دانلود مقاله + سفارش ترجمه
دانلود مقاله ISI انگلیسی
رایگان برای ایرانیان
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper presents the design and experimental verification of a new class of piezoelectric aluminum nitride (AlN) resonator with checker-patterned electrode architecture for mass sensing applications. The mass sensitivity of the developed sensor is analytically derived and confirmed with FEM simulations and experimental results. The results show that a 773 MHz resonator has mass sensitivity of 175.42 μm2/ng and detection limit of 18.7 ng/cm2. The developed sensor has an obtained mass sensitivity of 2–3 times higher than that of state-of-the-art mass sensors and provides high potential for developed piezoelectric transducers for mass sensing applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 189, 15 January 2013, Pages 298–306
Journal: Sensors and Actuators A: Physical - Volume 189, 15 January 2013, Pages 298–306
نویسندگان
Amir Heidari, Yong-Jin Yoon, Man I Lee, Lynn Khine, Mi Kyoung Park, Julius Ming Lin Tsai,