کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
737417 893930 2007 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Deflection of microcantilever by growing vapor bubble
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Deflection of microcantilever by growing vapor bubble
چکیده انگلیسی
This work investigates the mechanics of microcantilever deflection due to growth of a vapor microbubble. We construct a theoretical model to predict the elastic beam deflection due to the capillary pressure developed by the bubble growing between the beam and a substrate. The theory is in good agreement with our experimental results in both macro- and micro-scales. The deflection of a thin-solid structure due to growing bubbles can be used in such micromachines as microactuators, microgenerators and micropumps, which are operated as immersed in liquid.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 136, Issue 2, 16 May 2007, Pages 717-722
نویسندگان
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