کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
737430 | 1461919 | 2012 | 9 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Vertical comb-drive MEMS mirror with sensing function for phase-shift device Vertical comb-drive MEMS mirror with sensing function for phase-shift device](/preview/png/737430.png)
We aim to develop a MEMS mirror fabricated by micro-fabrication technology to realize a phase-shift device, which is a key component of a two-dimensional Fourier spectrometer. This MEMS mirror is capable of high-precision movement in the vertical direction parallel to the reference plane. In this study, a vertical electrostatic comb-drive actuator and capacitance sensor were fabricated monolithically on a single chip, and then four of them were mounted around the movable mirror. We fabricated a MEMS mirror that was able to move in the vertical direction while sensing the tilting angle. As a result, it would be feasible to use this vertical comb-drive MEMS mirror with a sensing function for a phase-shift device that was able to control the vertical displacement and the tilting angle of a movable mirror.
Journal: Sensors and Actuators A: Physical - Volume 181, July 2012, Pages 61–69