کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
737433 | 1461919 | 2012 | 6 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: A normally closed electrostatic parylene microvalve for micro total analysis systems A normally closed electrostatic parylene microvalve for micro total analysis systems](/preview/png/737433.png)
This paper presents an electrostatically actuated, normally closed microvalve for parylene microfluidics. The proposed valve structure isolates the fluid from the electric field, and hence results in relatively low actuation potentials (<60 V) irrespective of the working fluid. Hereby, the microvalve solves electrolysis or electrode shielding problems observed in electrostatic actuation in micro total analysis systems. To investigate leakage properties, microvalves were tested under pressurized flow with de-ionized (DI) water. No detectable leakage ratio was observed up to 20 kPa inlet pressure, due to the unique semi-circular valve seat design. It was shown that the valve seat could be reconfigured to enable sealing at various pressure levels for different applications.
Journal: Sensors and Actuators A: Physical - Volume 181, July 2012, Pages 81–86