Laser profilometer using a Fabry–Perot etalon and an objective

This paper introduces an innovative laser profilometer using a Fabry–Perot etalon and an objective. Following the derivation of the measurement theory, an experimental setup constructed to realize the profilometer is demonstrated, and the experimental results from the uses of this setup are then presented. The experimental setup has a sensitivity, vertical resolution, and stability of 1.62/μm, 2.2 nm, and 6.6 nm, respectively, and the experimental results agree not only the validity but also the feasibility of the proposed profilometer.