The measurement of nano dimension standard by laser focus sensor

• A detailed analysis about the deviation is developed about the deviation by Laser Focus Sensor.
• A secondary coating technology is introduced to improve the measurement accuracy of the LFS.
• The experiments are performed to validate the method.

This paper presents a detailed discussion about the measurement deviation of Laser Focus Sensor (LFS) for the measurement of the nano dimension standard sample. A new method is developed to improve the measurement accuracy of the LFS in the nano dimension standard. The experimental results show that the secondary coating technology by sputtering Cu atomic on the nano dimension standard sample can improve the measurement accuracy of the LFS.