A probe with ultrathin film deflection sensor for scanning probe microscopy and material characterization

We report a microcantilever probe with a 5 nm gold deflection sensor for the study of local mechanical properties such as adhesion and elasticity on a sample. The probe has a dynamic range of tens of microns, which allows for a deeper insight into the mechanical properties of materials. The gauge factor of the piezoresistive sensor is 4.1 ± 0.1 and the deflection sensitivity is 0.1 ppm/nm. Noise analysis indicates a minimum detectable deflection of ≈0.7 nm. Topographical scans are demonstrated. Studies of adhesion and stiffness of two different samples demonstrate the usefulness of the probe in the investigation of local mechanical properties.