A 21.5Â kHz high optical resolution electrostatic double-layered vibratory grating laser scanner

This article presents a 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner with an improved grating platform. Detailed optical characterizations of the prototype scanner is measured and reported. The scanner is capable of scanning a laser beam at about 21.5 kHz. The optical resolution of the prototype scanner is measured to be 916 pixels per-unidirectional-scan while scanning in atmosphere. While scanning in vacuum condition, the optical resolution can be estimated to be 1460 pixels per-unidirectional-scan, which is suitable for SXGA (1280 × 1024) resolution scanned beam displays.