Fabrication of gas ionization sensor using carbon nanotube arrays grown on porous silicon substrate

We fabricated gas sensors based on field ionization from multiwalled carbon nanotube (MWCNT) arrays grown on porous silicon templates. MWCNTs were grown through thermal chemical vapor deposition. We measured breakdown voltages, discharge and pre-discharge currents of the device for various gases in different concentrations. Our gas ionization sensors (GIS) presented good sensitivity, selectivity and short response time. The GISs based on porous substrates showed higher discharge current and good mechanical stability in comparison to those which were fabricated on polished silicon substrates. Additionally, we applied a high electric field to align CNTs. This increased the pre-breakdown current. Also, introducing humidity in dry air caused enhancement in pre-breakdown current and lowered breakdown voltage. We also used our GIS in monitoring gas mixtures.