Gas sensing properties of RF magnetron sputtered MgIn2O4 thin films

MgIn2O4 thin films have been deposited on glass substrates by RF magnetron sputtering technique and their sensing characteristics were investigated in this study. The experimental results showed that the MIO exhibited high sensitivity and selectivity for the detection of ethanol. The gas-sensitive behavior of RF sputtered MIO thin films can be altered by varying the fabrication parameters like the sputtering power, substrate temperature. In particular, the sensitivity can be increased. The thickness of MIO films was measured by Mitutoyo SJ-301 surface roughness tester. The morphology, composition and crystal structure were investigated by using SEM, EDAX and XRD. Hall measurements showed n-type conductivity with electron mobility value 6.9 cm2/(V s) and carrier concentration of 1.40 × 1018 cm−3.