کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
737827 | 1461930 | 2010 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
The preparation and humidity sensing of nickel coated silicon microchannel plate (Ni/Si-MCP) materials are studied. The silicon MCP fabricated by electrochemical etching has ordered channels and macro-porous structures. Nickel is coated by electroless plating onto the inner wall of the silicon MCP for the detection of humidity. Scanning electron microscopy (SEM) and energy-dispersive X-ray spectroscopy (EDS) are used to determine the structural and morphological properties. Our results show that the Ni/Si-MCP nanocomposites have high sensitivity and fast response time. They are compatible with current IC processes and have promising applications as integrated micro humidity sensors.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 160, Issues 1–2, May 2010, Pages 48–53
Journal: Sensors and Actuators A: Physical - Volume 160, Issues 1–2, May 2010, Pages 48–53
نویسندگان
Fengjuan Miao, Bairui Tao, Li Sun, Tao Liu, Jinchuan You, Lianwei Wang, Paul K. Chu,