کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
737843 1461923 2012 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Microfabrication of compliant all-polymer MEMS thermal actuators
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Microfabrication of compliant all-polymer MEMS thermal actuators
چکیده انگلیسی

This paper presents a fabrication process for compliant all-polymer MEMS actuators. This process allows high-aspect ratio conductive and non-conductive polymer features to be fabricated together in-plane. With this capability, robust all-polymer thermal actuators have demonstrated displacements as large at 100 μm and forces as high as 55 μN. The actuators are fabricated with elastomeric materials only, so they are very robust and can undergo large strains in both tension and bending and still operate once released.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 177, April 2012, Pages 16–22
نویسندگان
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