کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
737944 893973 2011 15 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Vibration sensitivity analysis of MEMS vibratory ring gyroscopes
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Vibration sensitivity analysis of MEMS vibratory ring gyroscopes
چکیده انگلیسی

This paper presents a detailed model for possible vibration effects on MEMS degenerate gyroscopes represented by vibratory ring gyroscopes. Ring gyroscopes are believed to be relatively vibration-insensitive because the vibration modes utilized during gyro operation are decoupled from the modes excited by environmental vibration. Our model incorporates four vibration modes needed to describe vibration-induced errors: two flexural modes (for gyro operation) and two translation modes (excited by external vibration). The four-mode dynamical model for ring gyroscopes is derived using Lagrange's equations. The model considers all elements comprising a ring gyroscope, namely the ring structure, the support-spring structures, and the electrodes that surround the ring structure. Inspection of this model demonstrates that the output of a ring gyroscope is fundamentally insensitive to vibration due to the decoupled dynamics governing ring translation versus ring flexure, however, becomes vibration-sensitive in the presence of non-proportional damping and/or capacitive nonlinearity at the sense electrodes.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 171, Issue 2, November 2011, Pages 163–177
نویسندگان
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