Self-sealed circular channels for micro-fluidics

The paper elaborates a technique to realize fully circular self-sealed channels with diameter varying from few micrometers to less than 100 nm using standard silicon processes like trench formation, doped silicon oxide filling and thermal cycle for its re-flow. The integration of the channels with the fluidic reservoirs, their packaging with input and output ports for fluids and external electrodes is also presented. Such a chip is used as lateral patch clamp to record the electrical activity of the cells.