کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738044 | 893982 | 2008 | 7 صفحه PDF | دانلود رایگان |
A packaging method for dies containing an electro-mechanical component on a silicon substrate with a polymer seal ring is described in this paper. A Surface Acoustic Wave (SAW) filter, which is a kind of Micro Electro-Mechanical System (MEMS), is used as a capping substrate. Two different polymers are tested, Benzocyclobutene (BCB) and SU-8. The polymer and the assembly processes are described. The package has been characterized mechanically and the influence of the package on the electrical operation of the filter has been evaluated. A finite element thermo-mechanical analysis has been performed to simulate and understand the behaviour of this heterogeneous flip-chip package. This package enables to decrease the size of the assembly around 50% in term of thickness and footprint area without any electrical degradation compared to a stand-alone component.
Journal: Sensors and Actuators A: Physical - Volume 142, Issue 1, 10 March 2008, Pages 185–191