کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738057 893982 2008 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Cost-effective system for the characterization of microstructures vibrating in out-of-plane modes
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Cost-effective system for the characterization of microstructures vibrating in out-of-plane modes
چکیده انگلیسی

A cost-effective system for the dynamic characterization of microstructures driven to vibrate in out-of-plane modes is presented. The proposed solution provides swept-frequency excitation of the microstructure under test and detects the corresponding displacement by a single-point optical triangulator interfaced to a tailored conditioning circuitry. By taking advantage of the forced excitation of the microstructure, the system performs synchronous undersampling of the signal from the triangulator to measure the frequency response of the microstructure. The proposed method is equivalent to coherent demodulation with lock-in detection, therefore inherently offers good signal-to-noise performances. The system has been prototyped making use of a PC-based data acquisition board and tested on different microstructures, such as a piezoelectric bimorph cantilever, a MEMS accelerometer, and a SOI microresonator with off-chip excitation.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 142, Issue 1, 10 March 2008, Pages 270–275
نویسندگان
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