A new approach for MEMS power generation based on a piezoelectric diaphragm

A new approach of a MEMS power generator based on a piezoelectric diaphragm is presented. A MEMS design is introduced taking into account an optimum diaphragm thickness and a beneficial electrode structure. Moreover, experiments for small and large deflections demonstrate the functionality of the energy converter. Electrical measurements point out dependencies regarding electrical load, residual stress within the diaphragm and electrode design. The frequency response for small deflections and the time response for large deflections of the device are also determined.