کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738062 | 893982 | 2008 | 10 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Modelling the dynamics of a MEMS resonator: Simulations and experiments
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Nonlinearities in MEMS silicon resonators are caused by different effects. Depending on the resonator layout, different nonlinearities may be dominant in the resonator response. Based on experimental results, a modelling approach is proposed to arrive at a nonlinear dynamic model that potentially captures the observed behaviour. Apart from the model, consisting of a mechanical and an electrical (measurement) part, the effect of thermal noise is also estimated. With the proposed model, a quantitative match between the simulation and experimental results is established such that a good starting point is achieved for a more thorough modelling procedure.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 142, Issue 1, 10 March 2008, Pages 306–315
Journal: Sensors and Actuators A: Physical - Volume 142, Issue 1, 10 March 2008, Pages 306–315
نویسندگان
R.M.C. Mestrom, R.H.B. Fey, J.T.M. van Beek, K.L. Phan, H. Nijmeijer,