GHz-range FSK-reception with microelectromechanical resonators

A micromechanical resonator with eigenfrequencies in the MHz-region is excited by using an AM-modulated GHz-range signal. The excitation voltage is down-converted to a force at the fundamental frequency of the resonator by voltage-force-non-linearity of the electromechanical transducer. Measurements are verified by simulations with excellent agreement. Finally, a method of coding information bits is presented and tested.