کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738142 893987 2011 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Readout of MEMS capacitive sensors beyond the condition of pull-in instability
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Readout of MEMS capacitive sensors beyond the condition of pull-in instability
چکیده انگلیسی

The ongoing transition between micro and nano electromechanical systems (MEMS and NEMS) based on capacitive sensing requires a solution to the problem of pull-in instability and, on the whole, to the relevance of the electrostatic readout forces with respect to other forces to be sensed (inertial, magnetic,…). The paper analyzes the case of a differential accelerometer which is dimensioned to be subject to instability (i.e. with a negative equivalent stiffness), when combined with a constant voltage readout of ±1.8 V. A charge controlled readout principle, based on an electronic feedback loop, is presented. Its switching capacitor VLSI implementation, built in a CMOS 0.35 μm technology is used to demonstrate, through experimental results, that this approach is effective in the minimization of the electrostatic readout forces.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 167, Issue 2, June 2011, Pages 374–384
نویسندگان
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