Pneumatically actuated active polymer pen lithography

We report the design, development and initial testing results of a parallel active polymer pen lithography (PPL) device. It is fabricated using soft lithography method with polydimethylsiloxane (PDMS) material. Individual probe is pneumatically actuated via a computer control interface. We show that the dimension of PPL-written patterns is a function of the applied pneumatic pressure and not one of the contact time. We further demonstrate computer controlled writing using 2 pens, with each pen producing a different pattern in the same run. We report the time and speed achievable with a single pen system.