A piezoelectric unimorph actuator based tip-tilt-piston micromirror with high fill factor and small tilt and lateral shift

This paper presents the design, fabrication and characterization of a piezoelectrically actuated high-fill-factor tip-tilt-piston (TTP) micromirror with small tilt and lateral shift during scanning. The piezoelectric material is a sol–gel lead zirconate titanate (PZT) thin film with a Zr/Ti ratio of 53/47. The small initial tilt and lateral-shift-free (LSF) of the mirror plate is achieved by a folded, three-segment piezoelectric unimorph actuator design. The piezoelectric unimorph actuation beams consist of Pt/Ti/PZT/Pt/Ti/SiO2 multilayers, which are released via undercutting the substrate silicon. The fabricated piezoelectric micromirror can be actuated about two rotational axes in the mirror plane and for translational vertical scan (piston actuation). The resonant frequencies of the piston and rotation modes are 316 Hz and 582 Hz, respectively. At their respective resonant frequencies, the maximum piston magnitude at resonant driving is 32 μm, and the two-dimensional rotating scan ranges are about 5°, both measured at a 2Vpp sinusoidal driving voltage.