کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738231 | 1461934 | 2007 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
3D glass fabrication utilizing electric field and heat treatment induced image mirroring
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: 3D glass fabrication utilizing electric field and heat treatment induced image mirroring 3D glass fabrication utilizing electric field and heat treatment induced image mirroring](/preview/png/738231.png)
چکیده انگلیسی
Despite the numerous advantages of a glass, difficulty of the fabrication, especially 3D fabrication, is still an obstacle. Here, we show a novel method to fabricate Pyrex glass in a simple and precise way. Combining conventional MEMS processes and a heat and electric field treatment, the Pyrex glass etching is realized by aluminum substitution for boron. Maximum depth and etching rate are influenced by temperature, applied voltage and aluminum thickness. By applying a range of voltages to different spot patterns or varying the thickness of the aluminum pattern, we were able to control the depth on a single substrate.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 139, Issues 1–2, 12 September 2007, Pages 287–292
Journal: Sensors and Actuators A: Physical - Volume 139, Issues 1–2, 12 September 2007, Pages 287–292
نویسندگان
Pan Kyeom Kim, Min Soo Kim, Geunbae Lim,