کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738255 | 893994 | 2011 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Development of a bioinspired MEMS based capacitive tactile sensor for a robotic finger
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper presents the development of a MEMS based capacitive tactile sensor intended to be incorporated into a tactile array as the core element of a biomimetic fingerpad. The use of standard microfabrication technologies in realising the device allowed a cost efficient fabrication involving only a few process steps. A low noise readout electronics system was developed for measuring the sensor response. The performance of both bare and packaged sensors was evaluated by direct probing of individual capacitive sensor units and characterising their response to load–unload indentation cycles.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 165, Issue 2, February 2011, Pages 221–229
Journal: Sensors and Actuators A: Physical - Volume 165, Issue 2, February 2011, Pages 221–229
نویسندگان
H.B. Muhammad, C.M. Oddo, L. Beccai, C. Recchiuto, C.J. Anthony, M.J. Adams, M.C. Carrozza, D.W.L. Hukins, M.C.L. Ward,