Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors

In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.