کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738258 | 893994 | 2011 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication and electrical properties of polymer-derived ceramic (PDC) thin films for high-temperature heat flux sensors
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله

چکیده انگلیسی
In this paper, we describe the fabrication of ceramic thin films for high-temperature heat flux sensors. The polymer-derived ceramic (PDC) thin films are prepared by using soft lithography on pre-ceramic polymer precursors followed by pyrolysis and heat treatment. Processing routes have been developed which lead to thin film resistance-thermal detectors (RTD) that have sufficient mechanical strength for handling and for use in thermal sensing. The effect of annealing temperatures on the electric resistivity of the PDC sensors was investigated. The electrical resistivity of the sensors was measured at different temperatures.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 165, Issue 2, February 2011, Pages 250–255
Journal: Sensors and Actuators A: Physical - Volume 165, Issue 2, February 2011, Pages 250–255
نویسندگان
Duckbong Seo, Sunghoon Jung, Stephen J. Lombardo, Z.C. Feng, J.K. Chen, Yuwen Zhang,