Miniature orthogonal optical scanning mirror excited by torsional piezoelectric fiber actuator

A novel optical scanner excited by a torsional piezoelectric fiber actuator is presented. The device consists of a piezoelectric fiber actuator generating torsional and longitudinal vibrations simultaneously and a specially designed metal frame transforming the two vibrations to orthogonal deflections of the mirror. Theoretical and experimental studies were performed on the structure. The changing trends of the vibration modes and resonant frequencies were obtained from finite element simulations. Samples with 1 mm × 1 mm mirrors were fabricated from PZT hollow fibers with a diameter of 1 mm and a stainless steel sheet with a thickness of 50 μm. A horizontal scanning angle of 17.9° and a vertical scanning angle of 2.6° were achieved at 6780 and 10,330 Hz under an applied voltage of 400 Vp–p.