کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738393 894002 2007 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Development of various designs of low-power, MEMS valves for fluidic applications
کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Development of various designs of low-power, MEMS valves for fluidic applications
چکیده انگلیسی

Automated, controlled fluid delivery is an important operation in micro-total analysis systems (μTAS). Actuated micro-valves have been proposed to separate a pressurized fluid from the channel to be filled. This scheme greatly reduced the energy required to move the fluid. The design, micro-fabrication and performance of arrays of single-use valve, which constitute an integral part of this actuation mechanism, is presented. The addressable constituent of the valve is a thin metallic ohmic resistor, whose design dictates the actuation voltage. The resistor is patterned on a silicon nitride membrane that constitutes the flow barrier, which stands on a silicon wafer. Rapid heating via an electric pulse induces thermal stresses in the membrane/resistor, which in turn breaks the membrane opening the valves. The chosen processing steps allow for wafer-level device fabrication using standard MEMS processing tools. Different size membranes with various thicknesses (1, 2 and 3 μm) are tested. Valves that withstand a pressure differential of up to 5 bar (3 mm × 3 mm, 3 μm-thick silicon nitride membranes) were chosen for the study. Investigated valves were activated with a potentials ranging between 14 and 140 V and required activation energies from tens to hundreds of milliJoules.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 136, Issue 1, 1 May 2007, Pages 374–384
نویسندگان
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