کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738423 | 894007 | 2007 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage Silicon nitride cantilever array integrated with silicon heaters and piezoelectric detectors for probe-based data storage](/preview/png/738423.png)
چکیده انگلیسی
In this paper, new silicon nitride cantilevers integrated with silicon heaters and piezoelectric sensors have been developed to obtain an improved uniformity of the initial bending and the mechanical stability of the cantilever array for thermo-piezoelectric probe-based data storage. This nitride cantilever showed thickness uniformity less than 2%. Data bits of 40 nm in diameter were recorded on PMMA film. Sensitivity of the piezoelectric sensor was measured to be 0.615 fC/nm after poling, implying that indentations less than 20 nm in depth can be detected. Finally, 128 × 128 probe array was developed for high speed operation.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 134, Issue 2, 15 March 2007, Pages 329–333
Journal: Sensors and Actuators A: Physical - Volume 134, Issue 2, 15 March 2007, Pages 329–333
نویسندگان
Hyo-Jin Nam, Young-Sik Kim, Caroline Sunyong Lee, Won-Hyeog Jin, Seong-Soo Jang, Il-Joo Cho, Jong-Uk Bu, Woo Beom Choi, Seung Woo Choi,