Wafer-scale fabrication of infrared detectors based on tunneling displacement transducers

Miniaturized Golay cells based on tunneling displacement transducers were first produced at the Jet Propulsion Laboratory (JPL). The devices produced have performance characteristics comparable to the best thermal infrared detectors of comparable dimensions. This work describes a high yield wafer-scale process for fabrication of tunneling infrared detectors. The sensors produced have performance comparable to the best tunneling sensors made so far.