کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738484 894009 2009 9 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Systematic study of electropolishing technique for improving the quality and production reproducibility of tungsten STM probe
چکیده انگلیسی

Based on the systematic study of electropolishing process, an improved tungsten STM probe fabrication technique has been presented. The proper combination of pulse current and the electrolyte concentration is explored for the elimination of impurities and achieves high quality probes with ultra-smooth surfaces. An optimized immersion depth of tungsten wire in electrolyte is proposed for the purpose of realizing the probe with sharp apex as well as high aspect ratio structure. A control strategy for determining the power-off instant during the procedure of electropolishing is developed which will facilitate the fabrication of probe with exponential contour as well as ultrasharp tip. The proposed technique and process are experimentally confirmed to have advantages for the STM probe fabrication of the stabilized stylus contour, typically with apex radius of 30 nm and the yield rate reaches as high as 85%.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 155, Issue 1, October 2009, Pages 136–144
نویسندگان
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