کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738565 894019 2009 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A micromachined AC thermal sensor for monitoring the liquid–gas interface in a microchannel
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
A micromachined AC thermal sensor for monitoring the liquid–gas interface in a microchannel
چکیده انگلیسی

A novel micromachined sensor for monitoring the liquid–gas phase interface in a microchannel is developed based on the three-omega (3ω) thermal-sensing method. As the sensor employs an AC hot-film technique to probe the position and movement of the phase interface, it is more sensitive and noise-resistant than the existing DC technique. Accordingly, it can monitor stagnant or slowly moving interfaces effectively. The sensor is composed of a thin-film heater integrated into a PDMS (polydimethylsiloxane) microchannel fabricated on a glass substrate. The performance of the sensor is analyzed by examining water injection and liquid evaporation processes. The results show good agreement with those by optical inspection. In particular, it is demonstrated that the sensor can effectively monitor a long-term evaporation process taking place over a time scale longer than an hour. These results demonstrate strong potential of the proposed sensor as an integrated real-time probe to monitor a variety of flow features occurring in microfluidic systems.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 150, Issue 1, 16 March 2009, Pages 40–45
نویسندگان
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