Effects of PbTiO3 seeding layer on electrical properties of PbZr0.4Ti0.6O3 thin films

Improvements in the ferroelectric properties were obtained by controlling process parameters of the lead titanate (PTO) seed layer. Highly oriented (1 1 1) perovskite lead zirconate titanate (PZT) films yielded the largest polarization switching charges, with an improved retention behavior, compared to those of PZT films without a PbTiO3 seed layer. The degree of (1 1 1) orientation in a PZT perovskite film increased, when an additional heat treatment process was not applied during formation of the PTO seed layer. In addition, PTO seed layers showed the best results when 8% excess Pb was supplied.