کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738631 894021 2006 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
A microtranslation table with scratch-drive actuators fabricated from silicon-on-insulator wafer
چکیده انگلیسی

From a silicon-on-insulator (SOI) wafer, a microtranslation table with scratch-drive actuator (SDA) has been fabricated. The device Si layer of SOI wafer is etched to form the plate of SDA, which is partially connected to the handle Si substrate by the SiO2 layer. Dicing the handle Si substrate, a microtranslation table with the SDA array has been fabricated. Placing the microtranslation table upside down on the other Si substrate on which a thin conductive film is patterned for the electrical connection, the microtranslation table is moved by the SDA without carrying a metal wire. The moving velocity of 45.5 μm/s has been obtained by applying the voltage of 120 V at the operating frequency of 500 Hz.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 125, Issue 2, 10 January 2006, Pages 451–457
نویسندگان
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