A 9.45 MHz micromechanical disk resonator with movable electrodes for gap reduction

• We discussed designing a micromechanical wine glass modal disk resonator with movable electrodes for gap reduction.
• The measured insertion loss improved 23 dB for the novel resonator.
• Exposed some problems following with the movable mechanical structure.

A micro-electromechanical wine glass modal disk resonator with movable electrodes is presented in this paper. The movable electrodes were driven by electrostatic force for gap reduction to reduce insertion loss. By reducing the gap from 2.5 μm to 0.5 μm, the insertion loss improved from −104 dB to −81 dB at the same bias voltage of 20 V. However, unstable movable electrodes caused the quality factor to decrease from 920,000 to 27,200.