A hybrid-assembled MEMS Fabry-Pérot wavelength tunable filter

We have developed a wavelength tunable fiber optic filter by using a hybrid-assembly technique of glass reflector cubes (volume 1 mm3) onto a bulk-micromachined electrostatic translation stage (4 mm × 5 mm). More than 0.6-μm-change of the Fabry-Pérot interferometer gap could be electrostatically controlled with a tuning voltage upwards of 4 V with the aid of a DC bias voltage of 64 V. A wide tuning range from 1479 to 1590 nm was achieved with a bandwidth of 1.3–1.2 nm and insertion loss of 1.59–1.76 dB.