کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738728 | 1461932 | 2008 | 8 صفحه PDF | دانلود رایگان |
![عکس صفحه اول مقاله: Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones Automated extraction of multi-energy domain reduced-order models demonstrated on capacitive MEMS microphones](/preview/png/738728.png)
We present a methodology to systematically extract efficient and physically-based reduced-order models based on a mixed-level simulation approach and demonstrate its practicality for the design of a capacitive MEMS microphone. The method has been implemented in a MATLAB toolbox. Starting from a FEM discretization, it enables the automated generation of mixed-level VHDL-AMS based macromodels, which can be straightforwardly fed into a standard circuit simulator. The whole model generation process is described in all details. The resulting macromodels are highly efficient and moreover, in contrast to other equivalent network approaches, physically-based. Therefore they allow for the predictive simulation of microstructures with complex geometry, as it is demonstrated by the numerical analysis of a capacitive microphone.
Journal: Sensors and Actuators A: Physical - Volumes 145–146, July–August 2008, Pages 263–270