Design and fabrication of MEMS-based monolithic fuel cells

This paper describes the design, fabrication and performance of small fuel cells using micro electromechanical systems (MEMS) technology. In this study, one of our biggest challenges was to integrate the carbon material widely used (as gas diffusion and catalyst layers) in fuel cells with all other components in the MEMS process. First, as a unique feature of our prototype, multi-wall carbon nanotube (MWCNT) was employed as a promising material suitable for both the gas diffusion and catalyst support layers. Second, our MEMS-based fuel cell prototype consisted of only three component layers – electromechanically integrated anode and cathode, and proton exchange membrane (PEM). The prototype was successfully demonstrated with maximum power output of 75 mW/cm2 at current density of approximately 0.2 A/cm2 without any pressurizing mechanism. The demonstration of the prototype indicated that MEMS-based components were sufficient for fuel cell applications, and that MEMS technology could help in realizing mass-produced small fuel cells with uniform specifications, such as integrated circuits.