کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738743 | 1461932 | 2008 | 9 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A large vertical displacement electrothermal bimorph microactuator with very small lateral shift
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper reports a novel electrothermal actuator design that can generate large vertical displacements with almost no lateral shift. The lateral-shift-free (LSF) piston motion is achieved by using a unique three-bimorph actuation mechanism. Both micromirrors and microlens holders based on this new actuator design have been fabricated using a combined surface- and bulk-micromachining process. A 0.62 mm vertical displacement is measured at only 5.3 V for a fabricated 0.8 mm by 0.8 mm micromirror, and both the lateral shift (10 μm) and tilting angle (0.7°) are very small in that full vertical displacement range. The measured resonant frequency of the vertical motion mode is about 0.5 KHz. The thermal response time is about 25 ms.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volumes 145–146, July–August 2008, Pages 371–379
Journal: Sensors and Actuators A: Physical - Volumes 145–146, July–August 2008, Pages 371–379
نویسندگان
Lei Wu, Huikai Xie,