کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738757 894033 2008 10 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Microcantilever hotplates with temperature-compensated piezoresistive strain sensors
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Microcantilever hotplates with temperature-compensated piezoresistive strain sensors
چکیده انگلیسی

This paper describes the design, fabrication, and characterization of microcantilever hotplates having both a resistive heater and temperature-compensated piezoresistive strain gauges. The heater was defined near the cantilever free end and the piezoresistive strain gauges were integrated near the clamped base. To realize temperature compensation, a pair of identical piezoresistors was defined in close proximity. One piezoresistor was aligned to the 〈1 1 0〉 crystal direction where the piezoresistive coefficient is maximized and the other one was aligned to the 〈1 0 0〉 crystal direction where the piezoresistive coefficient is nearly zero. The fabricated devices exhibit excellent temperature compensation, with a 20× reduction in temperature sensitivity. The deflection sensitivity shifted only 10% for heating to 200 °C and cantilever deflection ∼10 μm. This work enables cantilever strain sensors that could measure temperature-dependant phenomena.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 143, Issue 2, 16 May 2008, Pages 181–190
نویسندگان
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