کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
738783 894033 2008 7 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Levitation compensation method for dynamic electrostatic comb-drive actuators
موضوعات مرتبط
مهندسی و علوم پایه شیمی الکتروشیمی
پیش نمایش صفحه اول مقاله
Levitation compensation method for dynamic electrostatic comb-drive actuators
چکیده انگلیسی

An analytical method was developed for maintaining a constant levitation height during dynamic operation of reciprocating comb-drive actuators. The dependence of the translational position and the levitation height on the applied voltage was used to design waveforms that maintain a given translational motion without altering the levitation height. An experimental protocol was established for determining the necessary geometric factors of a particular comb-drive design, which were then used to generate constant-velocity levitation waveforms. The analytical model was tested experimentally by examining the levitation and translation positions of a surface micromachine under both compensated and uncompensated signals. A significant reduction in the range of levitation was obtained over the entire amplitude of the oscillatory motion, while the translational motion remained relatively unchanged. Design and fabrication effects on the compensated levitation height of an oscillating surface micromachine are discussed in the context of analytical and experimental results.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 143, Issue 2, 16 May 2008, Pages 383–389
نویسندگان
, , , ,