A 0.18-μm CMOS capacitive sensor Lab-on-Chip

In this paper, we put forward a capacitive sensor for Lab-on-Chip applications using a charge-based capacitance measurement (CBCM) method. This simple and highly sensitive capacitive sensor is implemented in the TSMC 0.18 CMOS process to which we incorporate microfluidic structures for chemical sensing. The post-layout simulation, fabrication and preliminary Lab-on-Chip testing results are also reported.