کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
738857 | 894045 | 2008 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A closed-form approach for frequency tunable comb resonators with curved finger contour
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: A closed-form approach for frequency tunable comb resonators with curved finger contour A closed-form approach for frequency tunable comb resonators with curved finger contour](/preview/png/738857.png)
چکیده انگلیسی
Frequency tunable comb resonators have been successfully designed and demonstrated based on a closed-form approach of a curved comb finger contour. Experimentally, the resonant frequency of a laterally driven comb resonator with 186 pairs of curved finger contour has been reduced by 55% from the initial frequency of 19 kHz under a bias voltage of 150 V. The corresponding effective stiffness has been decreased by 80% from the initial value of 2.64 N/m. This closed-form design approach could be extended to microsystems based on electrostatic comb-shape structures such as microaccelerometers, microgyroscopes, and micromechanical filters.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 141, Issue 2, 15 February 2008, Pages 523–529
Journal: Sensors and Actuators A: Physical - Volume 141, Issue 2, 15 February 2008, Pages 523–529
نویسندگان
Ki Bang Lee, Liwei Lin, Young-Ho Cho,